Sol-gel based fabrication methods for photonic crystals

................................................................................... viii CHAPTER 1. INTRODUCYION ........................................................... 1 1.1 Motivation ................................................................................. 1 1.2 Outline ..................................................................................... 2 CHAPTER 2. SOL-GEL PHOTONIC WITH IMPRINT LITHOGRAPHY ...... 4 2.1 Sol-gel Chemistry ...................................................................... 4 2.2 Sol-gel Imprint Lithography .......................................................... 8 2.3 Sol-gel Photonics ...................................................................... 10 CHAPTER 3. SOL-GEL BASED GUIDED MODE RESONANT FILTER ...... 13 3.1 Guided Mode Resonant Filter ......................................................... 13 3.2 Numerical Design of GMR structure ............................................... 14 3.3 Fabrication ............................. ................................................... 17 3.3.1 Preparation of Sol-gel Solution ................................................ 17 3.2.3 Sol-gel Imprint Process ......................................................... 17 3.4 Characterization ....................................................................... 19 3.4.1 Spectral Measurements ......................................................... 19 3.4.2 Nanostructure Inspection and Energy Dispersive X-ray Analysis ....... 19 3.4.3 Tuning of GMR Wavelength by Thickness of Sol-gel Film .............. 21 3.4.4 Tuning of GMR Wavelength by Refractive Index of Sol-gel Film...... 23 3.5 Application: GMR Sensors for Refractometric Measurement ................. 24 3.5.1 Reflection Measurements of Solutions with Different Indexes ......... 24 3.5.2 Detection of Polymer Thin Film Deposition ............................... 25 CHAPTER 4. SOL-GEL BASED 3D PHOTONIC CRYSTAL .................... 27 4.1 Capillary 3D Photonic Crystal ..................................................... 27 4.2 Fabrication ............................................................................ 28 4.3 Simulation ............................................................................. 29 4.4 Characterization ...................................................................... 33